Electron Micro Probe Analysis

JEOL Superprobe 8100 with energy-dispersive system (Noran/Thermo), B – U,
5 wavelengthe specrometers (14 crystals, optimization for low Z-elements), BSE-imaging, SE-imaging, cathodo-luminiscence


Sample preparation for electron probe micro analysis (EPMA)

Carbon coating facility, Au-sputter facility