Electron Probe Microanalyzer


The electron microprobe facility of the Institute of Mineralogy and Petrography has recently been upgraded by the acquisition of a JEOL JXA-iSP100 electron microprobe. The instrument can be operated with an accelerating voltage in the range 0.2 and 30 kV (0.1 kV steps) and a beam current from 1pA to 10µA (continuously).
Instrument configuration:

  1. Five WDS spectrometers
    CH1 TAP, PETJ, LDE1, LDE2 (flow counter) → high spectral resolution
    CH2 PETJ, LIF (sealed counter) → high spectral resolution
    CH3 PETL, LIFL (sealed counter) → Improved count rate at high spectral resolution
    CH4 PETH, LIFH (sealed counter) → Highest count rate
    CH5 TAP, PETJ (flow counter) → high spectral resolution
    with this set of analyzer crystals, elements in the atomic number range Z = 5 (B) to 92 (U) can be detected
  2. Thermionic emission gun: A tungsten emitter as well as a LaB6 emitter for higher spatial resolution are available.
  3. Fully integrated EDS system: EDX detector (JEOL): Peltier cooled 30 mm2 silicon-drift detector (SSD) with an energy resolution of ≤129 eV and a detectable element range from B to U (spot and line analysis; elemental mapping); the EDS system can be quantitatively calibrated and combined with the WDS system for quantitative analysis
  4. Secondary electron detector (Everhart-Thornley type), Backscattered electron detector operating in both compositional and topographic mode.
  5. Panchromatic cathodoluminescence detector
  6. Fully automated specimen exchange chamber: Sample sizes: 1inch round disks, 46x27mm rectangular sections


The new JEOL JXA-iSP100 Instrument at the Institute of Mineralogy and Petrography
Elementzonierungsmuster eines Granats aus einem Pegmatit des Texelkomplexes (Südtirol).
Cl-Bild eines Zirkons aus einem Mantelxenolith (MARID) Kimberley, Südafrika


Sample preparation for electron probe micro analysis (EPMA)

Carbon coating facility, Au-sputter facility

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