Description of the method
EDX spectroscopy (energy-dispersive X-ray spectroscopy, English: energy dispersive X-ray spectroscopy) is a surface analysis technique in which a focused electron beam scans a sample and triggers characteristic X-rays from the excited atoms — these are detected by a detector as a spectrum. The method allows both qualitative and quantitative conclusions to be drawn about the chemical elemental composition and its local distribution, for example at specific points, along a line or over an area.
Examples of applications
- Investigation of residues, contaminants or deposits on sample surfaces
- Measurement of the layer thickness of thin coatings and used for quality control
Contact
Professor Oliver I. Strube
Department of Chemical Engineering
Innrain 80–82, 6020 Innsbruck
+43 (512) 507 55300
Email Website
Devices:
Scanning electron microscope (SEM) - TESCAN Clara with EDX-, EBSD- and STEM-detectors
Scanning electron microscope (SEM) - Thermo Fisher Phenom XL with EDX-Detector
Description